The Resource 10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California, sponsored by Bacus International, (electronic book)

10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California, sponsored by Bacus International, (electronic book)

Label
10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California
Title
10th Annual Symposium on Microlithography
Title remainder
proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California
Statement of responsibility
sponsored by Bacus International
Title variation
Tenth Annual Symposium on Microlithography
Creator
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Dewey number
621.381/52
Illustrations
illustrations
Index
index present
LC call number
TK7871.85
LC item number
.S965 1990
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
1990
http://bibfra.me/vocab/lite/meetingName
Symposium on Microlithography
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • BACUS International (Firm)
  • SPIE Digital Library
Series statement
SPIE proceedings series,
Series volume
1496
http://library.link/vocab/subjectName
  • Semiconductors
  • Microlithography
  • Masks (Electronics)
Label
10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California, sponsored by Bacus International, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
v, 315 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California, sponsored by Bacus International, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
v, 315 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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