The Resource 12th Annual Symposium on Photomask Technology and Management : proceedings : 23-24 September 1992, Sunnyvale, California, sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology, (electronic book)

12th Annual Symposium on Photomask Technology and Management : proceedings : 23-24 September 1992, Sunnyvale, California, sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology, (electronic book)

Label
12th Annual Symposium on Photomask Technology and Management : proceedings : 23-24 September 1992, Sunnyvale, California
Title
12th Annual Symposium on Photomask Technology and Management
Title remainder
proceedings : 23-24 September 1992, Sunnyvale, California
Statement of responsibility
sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
Title variation
  • Twelfth Annual Symposium on Photomask Technology and Management
  • 12th Annual BACUS Symposium on Photomask Technology
Creator
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Dewey number
621.3815/31
Illustrations
illustrations
Index
index present
LC call number
TK7874
LC item number
.S9435 1992
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
1992
http://bibfra.me/vocab/lite/meetingName
Symposium on Photomask Technology and Management
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • BACUS (Technical group)
  • SPIE Digital Library
Series statement
SPIE proceedings series,
Series volume
1809
http://library.link/vocab/subjectName
  • Integrated circuits
  • Microlithography
Label
12th Annual Symposium on Photomask Technology and Management : proceedings : 23-24 September 1992, Sunnyvale, California, sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
ix, 286 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
12th Annual Symposium on Photomask Technology and Management : proceedings : 23-24 September 1992, Sunnyvale, California, sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
ix, 286 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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