The Resource 24th Annual BACUS Symposium on Photomask Technology : 14-17 September, 2004, Monterey, California, USA, Wolfgang Staud, J. Tracy Weed, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology [and] SPIE--the International Society for Optical Engineering ; published by SPIE--the International Society for Optical Engineering, (electronic book)

24th Annual BACUS Symposium on Photomask Technology : 14-17 September, 2004, Monterey, California, USA, Wolfgang Staud, J. Tracy Weed, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology [and] SPIE--the International Society for Optical Engineering ; published by SPIE--the International Society for Optical Engineering, (electronic book)

Label
24th Annual BACUS Symposium on Photomask Technology : 14-17 September, 2004, Monterey, California, USA
Title
24th Annual BACUS Symposium on Photomask Technology
Title remainder
14-17 September, 2004, Monterey, California, USA
Statement of responsibility
Wolfgang Staud, J. Tracy Weed, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology [and] SPIE--the International Society for Optical Engineering ; published by SPIE--the International Society for Optical Engineering
Title variation
  • Annual BACUS Symposium on Photomask Technology
  • BACUS Symposium on Photomask Technology
  • Symposium on Photomask Technology
  • Photomask technology
Creator
Contributor
Subject
Genre
Language
eng
Related
Member of
Cataloging source
AZU
Illustrations
illustrations
Index
index present
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2004
http://bibfra.me/vocab/lite/meetingName
BACUS Symposium on Photomask Technology
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Staud, Wolfgang.
  • Weed, J., Tracy
  • BACUS (Technical group)
  • Society of Photo-optical Instrumentation Engineers
  • SPIE Digital Library
Series statement
SPIE proceedings series,
Series volume
5567
http://library.link/vocab/subjectName
  • Integrated circuits
  • Microlithography
Label
24th Annual BACUS Symposium on Photomask Technology : 14-17 September, 2004, Monterey, California, USA, Wolfgang Staud, J. Tracy Weed, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology [and] SPIE--the International Society for Optical Engineering ; published by SPIE--the International Society for Optical Engineering, (electronic book)
Instantiates
Publication
Note
Some earlier conferences have title: Symposium on Photomask Technology and Management
Bibliography note
Includes bibliographical references and author index
Color
mixed
Dimensions
28 cm.
Dimensions
unknown
Extent
2 v.
Form of item
electronic
Other physical details
ill. (some col.)
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
Label
24th Annual BACUS Symposium on Photomask Technology : 14-17 September, 2004, Monterey, California, USA, Wolfgang Staud, J. Tracy Weed, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology [and] SPIE--the International Society for Optical Engineering ; published by SPIE--the International Society for Optical Engineering, (electronic book)
Publication
Note
Some earlier conferences have title: Symposium on Photomask Technology and Management
Bibliography note
Includes bibliographical references and author index
Color
mixed
Dimensions
28 cm.
Dimensions
unknown
Extent
2 v.
Form of item
electronic
Other physical details
ill. (some col.)
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote

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