Coverart for item
The Resource 31st European Mask and Lithography Conference : 22-23 June 2015, Eindhoven, Netherlands, Uwe F.W. Behringer, Jo Finders, editors ; organized by VDE/VDI GMM -- The Society for Microelectronics, Micro- and Precision Engineering (Germany) ; published by SPIE

31st European Mask and Lithography Conference : 22-23 June 2015, Eindhoven, Netherlands, Uwe F.W. Behringer, Jo Finders, editors ; organized by VDE/VDI GMM -- The Society for Microelectronics, Micro- and Precision Engineering (Germany) ; published by SPIE

Label
31st European Mask and Lithography Conference : 22-23 June 2015, Eindhoven, Netherlands
Title
31st European Mask and Lithography Conference
Title remainder
22-23 June 2015, Eindhoven, Netherlands
Statement of responsibility
Uwe F.W. Behringer, Jo Finders, editors ; organized by VDE/VDI GMM -- The Society for Microelectronics, Micro- and Precision Engineering (Germany) ; published by SPIE
Title variation
  • Thirty-first European Mask and Lithography Conference
  • European Mask and Lithography Conference
  • EMLC2015
  • EMLC 2015
Creator
Contributor
Editor
Issuing body
Subject
Genre
Language
eng
Member of
Cataloging source
COO
Illustrations
illustrations
Index
no index present
LC call number
TK7872.M3
LC item number
E97 2015e
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2015
http://bibfra.me/vocab/lite/meetingName
European Mask and Lithography Conference
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Behringer, Uwe F. W.
  • Finders, Jo
  • SPIE (Society)
Series statement
Proceedings of SPIE,
Series volume
volume 9661
http://library.link/vocab/subjectName
  • Integrated circuits
  • Microlithography
Label
31st European Mask and Lithography Conference : 22-23 June 2015, Eindhoven, Netherlands, Uwe F.W. Behringer, Jo Finders, editors ; organized by VDE/VDI GMM -- The Society for Microelectronics, Micro- and Precision Engineering (Germany) ; published by SPIE
Instantiates
Publication
Copyright
Note
"31st European Mask and Lithography Conference, EMLC2015."
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9781628418798
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations (some color).
Specific material designation
remote
Label
31st European Mask and Lithography Conference : 22-23 June 2015, Eindhoven, Netherlands, Uwe F.W. Behringer, Jo Finders, editors ; organized by VDE/VDI GMM -- The Society for Microelectronics, Micro- and Precision Engineering (Germany) ; published by SPIE
Publication
Copyright
Note
"31st European Mask and Lithography Conference, EMLC2015."
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9781628418798
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations (some color).
Specific material designation
remote

Library Locations

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