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The Resource A guide to hands-on MEMS design and prototyping, Joel Kubby, (electronic book)

A guide to hands-on MEMS design and prototyping, Joel Kubby, (electronic book)

Label
A guide to hands-on MEMS design and prototyping
Title
A guide to hands-on MEMS design and prototyping
Statement of responsibility
Joel Kubby
Creator
Contributor
Subject
Language
eng
Summary
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--
Member of
Assigning source
Provided by publisher
Cataloging source
MiAaPQ
http://library.link/vocab/creatorName
Kubby, Joel A
Dewey number
621.381
Illustrations
illustrations
Index
index present
LC call number
TK7875
LC item number
.K83 2011
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
ProQuest (Firm)
http://library.link/vocab/subjectName
Microelectromechanical systems
Label
A guide to hands-on MEMS design and prototyping, Joel Kubby, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Contents
Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics
Control code
EBC775091
Dimensions
unknown
Extent
xi, 166 p.
Form of item
  • online
  • electronic
Isbn
9781139114257
Other physical details
col. ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
A guide to hands-on MEMS design and prototyping, Joel Kubby, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Contents
Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics
Control code
EBC775091
Dimensions
unknown
Extent
xi, 166 p.
Form of item
  • online
  • electronic
Isbn
9781139114257
Other physical details
col. ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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