Coverart for item
The Resource A guide to hands-on MEMS design and prototyping, Joel Kubby, (electronic book)

A guide to hands-on MEMS design and prototyping, Joel Kubby, (electronic book)

Label
A guide to hands-on MEMS design and prototyping
Title
A guide to hands-on MEMS design and prototyping
Statement of responsibility
Joel Kubby
Creator
Subject
Language
eng
Summary
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--
Member of
Assigning source
Provided by publisher
Cataloging source
N$T
http://library.link/vocab/creatorName
Kubby, Joel A.
Dewey number
621.381
Illustrations
  • illustrations
  • plates
Index
index present
LC call number
TK7875
LC item number
.K83 2011eb
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/subjectName
Microelectromechanical systems
Label
A guide to hands-on MEMS design and prototyping, Joel Kubby, (electronic book)
Instantiates
Publication
Antecedent source
unknown
Bibliography note
Includes bibliographical references and index
Color
multicolored
Contents
Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics
Dimensions
unknown
Extent
1 online resource (xi, 166 p., [16] p. of plates)
File format
unknown
Form of item
online
Isbn
9780521889254
Level of compression
unknown
Other control number
9786613295606
Other physical details
ill. (some col.).
Quality assurance targets
not applicable
Reformatting quality
unknown
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
Label
A guide to hands-on MEMS design and prototyping, Joel Kubby, (electronic book)
Publication
Antecedent source
unknown
Bibliography note
Includes bibliographical references and index
Color
multicolored
Contents
Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics
Dimensions
unknown
Extent
1 online resource (xi, 166 p., [16] p. of plates)
File format
unknown
Form of item
online
Isbn
9780521889254
Level of compression
unknown
Other control number
9786613295606
Other physical details
ill. (some col.).
Quality assurance targets
not applicable
Reformatting quality
unknown
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote

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