The Resource Advanced microlithography technologies : 8-10 November 2004, Beijing, China, Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.], (electronic book)

Advanced microlithography technologies : 8-10 November 2004, Beijing, China, Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.], (electronic book)

Label
Advanced microlithography technologies : 8-10 November 2004, Beijing, China
Title
Advanced microlithography technologies
Title remainder
8-10 November 2004, Beijing, China
Statement of responsibility
Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.]
Title variation
Microlithography technologies
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Illustrations
illustrations
Index
index present
LC call number
TK7872.M3
LC item number
A38 2004
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Wang, Yangyuan
  • Yao, Jun'en
  • Progler, Christopher J
  • Society of Photo-optical Instrumentation Engineers
  • Zhongguo guang xue xue hui.
  • Australian Optical Society.
  • Guo jia zi ran ke xue ji jin wei yuan hui (China)
  • SPIE Digital Library
Series statement
SPIE proceedings series,
Series volume
5645
http://library.link/vocab/subjectName
  • Microlithography
  • Integrated circuits
  • X-ray lithography
  • Manufacturing processes
Label
Advanced microlithography technologies : 8-10 November 2004, Beijing, China, Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.], (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and author index
Color
multicolored
Dimensions
28 cm.
Dimensions
unknown
Extent
xi, 380 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Advanced microlithography technologies : 8-10 November 2004, Beijing, China, Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.], (electronic book)
Publication
Bibliography note
Includes bibliographical references and author index
Color
multicolored
Dimensions
28 cm.
Dimensions
unknown
Extent
xi, 380 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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