The Resource Advances in mirror technology for X-ray, EUV lithography, laser and other applications : 7-8 August 2003, San Diego, California, USA, Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)

Advances in mirror technology for X-ray, EUV lithography, laser and other applications : 7-8 August 2003, San Diego, California, USA, Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)

Label
Advances in mirror technology for X-ray, EUV lithography, laser and other applications : 7-8 August 2003, San Diego, California, USA
Title
Advances in mirror technology for X-ray, EUV lithography, laser and other applications
Title remainder
7-8 August 2003, San Diego, California, USA
Statement of responsibility
Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Illustrations
illustrations
Index
index present
LC call number
QC385.2.D47
LC item number
A39 2004
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Khounsary, Ali M
  • Dinger, Udo
  • Ota, Kazuya
  • Society of Photo-optical Instrumentation Engineers
  • SPIE Digital Library
Series statement
SPIE proceedings series,
Series volume
5193
http://library.link/vocab/subjectName
  • Mirrors
  • Lasers
  • Optical coatings
  • Optical radiometry
Label
Advances in mirror technology for X-ray, EUV lithography, laser and other applications : 7-8 August 2003, San Diego, California, USA, Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
ix, 222 p.
Form of item
electronic
Other physical details
ill. (some col.)
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
Label
Advances in mirror technology for X-ray, EUV lithography, laser and other applications : 7-8 August 2003, San Diego, California, USA, Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
ix, 222 p.
Form of item
electronic
Other physical details
ill. (some col.)
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote

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