Coverart for item
The Resource Alternative Lithographic Technologies VIII, Christopher Bencher

Alternative Lithographic Technologies VIII, Christopher Bencher

Label
Alternative Lithographic Technologies VIII
Title
Alternative Lithographic Technologies VIII
Statement of responsibility
Christopher Bencher
Creator
Contributor
Author
Subject
Language
eng
Summary
Annotation
Member of
Cataloging source
COO
http://library.link/vocab/creatorName
Bencher, Christopher
Dewey number
621.381531
Index
no index present
LC call number
TK7872.M3
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
SPIE (Society)
Series statement
Proceedings of SPIE,
Series volume
volume 9777
http://library.link/vocab/subjectName
  • Lithography, Electron Beam
  • Masks (Electronics)
  • Microlithography
  • Technology & Engineering
  • Technology & Engineering
Summary expansion
'Proceedings of SPIE' presents the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields
Label
Alternative Lithographic Technologies VIII, Christopher Bencher
Instantiates
Publication
Copyright
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier MARC source
rdacarrier
Content category
text
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource.
Form of item
online
Isbn
9781510600126
Media category
computer
Media MARC source
rdamedia
Specific material designation
remote
Label
Alternative Lithographic Technologies VIII, Christopher Bencher
Publication
Copyright
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier MARC source
rdacarrier
Content category
text
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource.
Form of item
online
Isbn
9781510600126
Media category
computer
Media MARC source
rdamedia
Specific material designation
remote

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