Coverart for item
The Resource Alternative lithographic technologies III : 1-3 March 2011, San Jose, California, United States, Daniel J.C. Herr, editor ; sponsored and published by SPIE

Alternative lithographic technologies III : 1-3 March 2011, San Jose, California, United States, Daniel J.C. Herr, editor ; sponsored and published by SPIE

Label
Alternative lithographic technologies III : 1-3 March 2011, San Jose, California, United States
Title
Alternative lithographic technologies III
Title remainder
1-3 March 2011, San Jose, California, United States
Statement of responsibility
Daniel J.C. Herr, editor ; sponsored and published by SPIE
Title variation
  • Alternative lithographic technologies 3
  • Alternative lithographic technologies three
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Illustrations
illustrations
Index
no index present
LC call number
TK7872.M3
LC item number
A48 2011e
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Herr, Daniel J. C.
  • SPIE (Society)
Series statement
Proceedings of SPIE,
Series volume
v. 7970
http://library.link/vocab/subjectName
  • Extreme ultraviolet lithography
  • Lithography, Electron beam
  • Microlithography
  • Masks (Electronics)
Label
Alternative lithographic technologies III : 1-3 March 2011, San Jose, California, United States, Daniel J.C. Herr, editor ; sponsored and published by SPIE
Instantiates
Publication
Note
Title from title screen (SPIE digital library, viewed May 19, 2011)
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819485298
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Specific material designation
remote
Label
Alternative lithographic technologies III : 1-3 March 2011, San Jose, California, United States, Daniel J.C. Herr, editor ; sponsored and published by SPIE
Publication
Note
Title from title screen (SPIE digital library, viewed May 19, 2011)
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819485298
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Specific material designation
remote

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