Coverart for item
The Resource Alternative lithographic technologies IV : 13-16 February 2012, San Jose, California, United States, William M. Tong, Douglas J. Resnick, editors ; sponsored ... by SPIE

Alternative lithographic technologies IV : 13-16 February 2012, San Jose, California, United States, William M. Tong, Douglas J. Resnick, editors ; sponsored ... by SPIE

Label
Alternative lithographic technologies IV : 13-16 February 2012, San Jose, California, United States
Title
Alternative lithographic technologies IV
Title remainder
13-16 February 2012, San Jose, California, United States
Statement of responsibility
William M. Tong, Douglas J. Resnick, editors ; sponsored ... by SPIE
Title variation
  • Alternative lithographic technologies 4
  • Alternative lithographic technologies four
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Illustrations
illustrations
Index
no index present
LC call number
TK7872.M3
LC item number
A48 2012e
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1965-
http://library.link/vocab/relatedWorkOrContributorName
  • Tong, William Man-Wai
  • Resnick, Douglas J.
  • SPIE (Society)
Series statement
Proceedings of SPIE,
Series volume
v. 8323
http://library.link/vocab/subjectName
  • Extreme ultraviolet lithography
  • Lithography, Electron beam
  • Microlithography
  • Masks (Electronics)
Label
Alternative lithographic technologies IV : 13-16 February 2012, San Jose, California, United States, William M. Tong, Douglas J. Resnick, editors ; sponsored ... by SPIE
Instantiates
Publication
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819489791
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Specific material designation
remote
Label
Alternative lithographic technologies IV : 13-16 February 2012, San Jose, California, United States, William M. Tong, Douglas J. Resnick, editors ; sponsored ... by SPIE
Publication
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819489791
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Specific material designation
remote

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