Coverart for item
The Resource Alternative lithographic technologies V : 25-28 February 2013. San Jose, California, United States, William M. Tong, Douglas J. Resnick, editors ; sponsored by SPIE ; cosponsored by AZ Electronic Materials (United States)

Alternative lithographic technologies V : 25-28 February 2013. San Jose, California, United States, William M. Tong, Douglas J. Resnick, editors ; sponsored by SPIE ; cosponsored by AZ Electronic Materials (United States)

Label
Alternative lithographic technologies V : 25-28 February 2013. San Jose, California, United States
Title
Alternative lithographic technologies V
Title remainder
25-28 February 2013. San Jose, California, United States
Statement of responsibility
William M. Tong, Douglas J. Resnick, editors ; sponsored by SPIE ; cosponsored by AZ Electronic Materials (United States)
Title variation
  • Alternative lithographic technologies 5
  • Alternative lithographic technologies five
Contributor
Editor
Subject
Genre
Language
eng
Summary
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature
Member of
Cataloging source
COO
Illustrations
illustrations
Index
no index present
LC call number
TK7872.M3
LC item number
A48 2013e
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1965-
http://library.link/vocab/relatedWorkOrContributorName
  • Tong, William Man-Wai
  • Resnick, Douglas J.
  • SPIE (Society)
Series statement
Proceedings of SPIE,
Series volume
volume 8680
http://library.link/vocab/subjectName
  • Extreme ultraviolet lithography
  • Lithography, Electron beam
  • Microlithography
  • Masks (Electronics)
Label
Alternative lithographic technologies V : 25-28 February 2013. San Jose, California, United States, William M. Tong, Douglas J. Resnick, editors ; sponsored by SPIE ; cosponsored by AZ Electronic Materials (United States)
Instantiates
Publication
Copyright
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819494627
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Specific material designation
remote
Label
Alternative lithographic technologies V : 25-28 February 2013. San Jose, California, United States, William M. Tong, Douglas J. Resnick, editors ; sponsored by SPIE ; cosponsored by AZ Electronic Materials (United States)
Publication
Copyright
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819494627
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Specific material designation
remote

Library Locations

Processing Feedback ...