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The Resource An introduction to microelectromechanical systems engineering, Nadim Maluf, Kirt Williams

An introduction to microelectromechanical systems engineering, Nadim Maluf, Kirt Williams

Label
An introduction to microelectromechanical systems engineering
Title
An introduction to microelectromechanical systems engineering
Statement of responsibility
Nadim Maluf, Kirt Williams
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
REDDC
http://library.link/vocab/creatorName
Maluf, Nadim
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • standards specifications
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
Williams, Kirt
Series statement
Artech House microelectromechanical systems MEMS series
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Microtechnology
Label
An introduction to microelectromechanical systems engineering, Nadim Maluf, Kirt Williams
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Contents
  • Ch. 1.
  • MEMS : a technology from Lilliput.
  • p. 1
  • Ch. 2.
  • Materials for MEMS.
  • p. 13
  • Ch. 3.
  • Processes for micromachining.
  • p. 33
  • Ch. 4.
  • MEM structures and systems in industrial and automotive applications.
  • p. 79
  • Ch. 5.
  • MEM structures and systems in photonic applications.
  • p. 133
  • Ch. 6.
  • MEMS applications in life sciences.
  • p. 169
  • Ch. 7.
  • MEM structures and systems in RF applications.
  • p. 189
  • Ch. 8.
  • Packaging and reliability considerations for MEMS.
  • p. 217
Control code
ocm70722156
Dimensions
26 cm.
Dimensions
unknown
Edition
2nd ed.
Extent
xx, 283 p.
Form of item
electronic
Isbn
9781580535908
Lccn
2004050669
Other physical details
ill.
Specific material designation
remote
Label
An introduction to microelectromechanical systems engineering, Nadim Maluf, Kirt Williams
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Contents
  • Ch. 1.
  • MEMS : a technology from Lilliput.
  • p. 1
  • Ch. 2.
  • Materials for MEMS.
  • p. 13
  • Ch. 3.
  • Processes for micromachining.
  • p. 33
  • Ch. 4.
  • MEM structures and systems in industrial and automotive applications.
  • p. 79
  • Ch. 5.
  • MEM structures and systems in photonic applications.
  • p. 133
  • Ch. 6.
  • MEMS applications in life sciences.
  • p. 169
  • Ch. 7.
  • MEM structures and systems in RF applications.
  • p. 189
  • Ch. 8.
  • Packaging and reliability considerations for MEMS.
  • p. 217
Control code
ocm70722156
Dimensions
26 cm.
Dimensions
unknown
Edition
2nd ed.
Extent
xx, 283 p.
Form of item
electronic
Isbn
9781580535908
Lccn
2004050669
Other physical details
ill.
Specific material designation
remote

Library Locations

    • Harold Cohen LibraryBorrow it
      Ashton Street, Liverpool, L69 3DA, GB
      53.418074 -2.967913
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