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The Resource Ceramic thick films for MEMS and microdevices, Robert A. Dorey, (electronic book)

Ceramic thick films for MEMS and microdevices, Robert A. Dorey, (electronic book)

Label
Ceramic thick films for MEMS and microdevices
Title
Ceramic thick films for MEMS and microdevices
Statement of responsibility
Robert A. Dorey
Creator
Subject
Language
eng
Summary
The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc. Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups. Written by a single author, this book provides a clear, coherently-written guide to this important emerging technology. Covers materials, fabrication and applications in one book
Member of
Cataloging source
OPELS
http://library.link/vocab/creatorName
Dorey, Robert A
Dewey number
621.3815
Index
no index present
LC call number
TK7871.15.F5
LC item number
D67 2011eb
Literary form
non fiction
Nature of contents
dictionaries
Series statement
Micro and nano technologies series
http://library.link/vocab/subjectName
  • Thick-film circuits
  • Microelectromechanical systems
  • Nanoelectronics
  • Hybrid integrated circuits
  • Microelectromechanical systems
  • Thick-film circuits
  • Engineering
  • Electrical engineering
Label
Ceramic thick films for MEMS and microdevices, Robert A. Dorey, (electronic book)
Instantiates
Publication
Color
multicolored
Contents
Integration and applications -- Routes to thick films -- Thick film deposition techniques -- Microstructure-property relationships -- Pattering and structuring -- Houston, we have a problem: Thick film troubleshooting -- Recipes and techniques
Control code
SCIDI760157360
Dimensions
unknown
Extent
1 online resource (1 v.)
Form of item
online
Isbn
9781437778175
Specific material designation
remote
Label
Ceramic thick films for MEMS and microdevices, Robert A. Dorey, (electronic book)
Publication
Color
multicolored
Contents
Integration and applications -- Routes to thick films -- Thick film deposition techniques -- Microstructure-property relationships -- Pattering and structuring -- Houston, we have a problem: Thick film troubleshooting -- Recipes and techniques
Control code
SCIDI760157360
Dimensions
unknown
Extent
1 online resource (1 v.)
Form of item
online
Isbn
9781437778175
Specific material designation
remote

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