The Resource Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book)
Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book)
Resource Information
The item Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book) represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Liverpool.This item is available to borrow from 1 library branch.
Resource Information
The item Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book) represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Liverpool.
This item is available to borrow from 1 library branch.
- Label
- Computational lithography
- Title
- Computational lithography
- Statement of responsibility
- Xu Ma and Gonzalo R. Arce
- Language
- eng
- Cataloging source
- CaPaEBR
- http://library.link/vocab/creatorDate
- 1983-
- http://library.link/vocab/creatorName
- Ma, Xu
- Dewey number
- 621.381531
- Illustrations
- illustrations
- Index
- index present
- LC call number
- TK7872.M3
- LC item number
- M3 2010eb
- Literary form
- non fiction
- Nature of contents
-
- standards specifications
- bibliography
- http://library.link/vocab/relatedWorkOrContributorName
- Arce, Gonzalo R.
- http://library.link/vocab/subjectName
-
- Microlithography
- Integrated circuits
- Photolithography
- Semiconductors
- Resolution (Optics)
- Label
- Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book)
- Bibliography note
- Includes bibliographical references and index
- Color
- multicolored
- Control code
- ebr10419114
- Dimensions
- unknown
- Extent
- xv, 226 p.
- Form of item
- electronic
- Isbn
- 9780470596975
- Original version note
- Original electronic resource
- Other physical details
- ill.
- Reproduction note
- Electronic resource.
- Specific material designation
- remote
- Label
- Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book)
- Bibliography note
- Includes bibliographical references and index
- Color
- multicolored
- Control code
- ebr10419114
- Dimensions
- unknown
- Extent
- xv, 226 p.
- Form of item
- electronic
- Isbn
- 9780470596975
- Original version note
- Original electronic resource
- Other physical details
- ill.
- Reproduction note
- Electronic resource.
- Specific material designation
- remote
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/portal/Computational-lithography-Xu-Ma-and-Gonzalo-R./x_wwZzYGBD4/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/portal/Computational-lithography-Xu-Ma-and-Gonzalo-R./x_wwZzYGBD4/">Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book)</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">University of Liverpool</a></span></span></span></span></div>
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/portal/Computational-lithography-Xu-Ma-and-Gonzalo-R./x_wwZzYGBD4/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/portal/Computational-lithography-Xu-Ma-and-Gonzalo-R./x_wwZzYGBD4/">Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book)</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">University of Liverpool</a></span></span></span></span></div>
