Coverart for item
The Resource Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book)

Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book)

Label
Computational lithography
Title
Computational lithography
Statement of responsibility
Xu Ma and Gonzalo R. Arce
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
CaPaEBR
http://library.link/vocab/creatorDate
1983-
http://library.link/vocab/creatorName
Ma, Xu
Dewey number
621.381531
Illustrations
illustrations
Index
index present
LC call number
TK7872.M3
LC item number
M3 2010eb
Literary form
non fiction
Nature of contents
  • standards specifications
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
Arce, Gonzalo R.
http://library.link/vocab/subjectName
  • Microlithography
  • Integrated circuits
  • Photolithography
  • Semiconductors
  • Resolution (Optics)
Label
Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Control code
ebr10419114
Dimensions
unknown
Extent
xv, 226 p.
Form of item
electronic
Isbn
9780470596975
Original version note
Original electronic resource
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Computational lithography, Xu Ma and Gonzalo R. Arce, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Control code
ebr10419114
Dimensions
unknown
Extent
xv, 226 p.
Form of item
electronic
Isbn
9780470596975
Original version note
Original electronic resource
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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