The Resource Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France, Bernard Courtois ... [et al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ... [et al.], (electronic book)

Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France, Bernard Courtois ... [et al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ... [et al.], (electronic book)

Label
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
Title
Design, test, and microfabrication of MEMS and MOEMS
Title remainder
30 March-1 April 1999, Paris, France
Statement of responsibility
Bernard Courtois ... [et al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ... [et al.]
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Bourtois, Bernard
  • Society of Photo-optical Instrumentation Engineers
  • SPIE Digital Library
Series statement
SPIE proceedings series
Series volume
3680
http://library.link/vocab/subjectName
Microelectromechanical systems
Label
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France, Bernard Courtois ... [et al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ... [et al.], (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
2 v. (xix, 1192 p.)
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France, Bernard Courtois ... [et al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ... [et al.], (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
2 v. (xix, 1192 p.)
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

Library Locations

Processing Feedback ...