Coverart for item
The Resource Developments in semiconductor microlithography III : April 10-11, 1978, San Jose, California, Richard L. Ruddell [and others] editors ; presented by the Society of Photo-optical Instrumentation Engineers

Developments in semiconductor microlithography III : April 10-11, 1978, San Jose, California, Richard L. Ruddell [and others] editors ; presented by the Society of Photo-optical Instrumentation Engineers

Label
Developments in semiconductor microlithography III : April 10-11, 1978, San Jose, California
Title
Developments in semiconductor microlithography III
Title remainder
April 10-11, 1978, San Jose, California
Statement of responsibility
Richard L. Ruddell [and others] editors ; presented by the Society of Photo-optical Instrumentation Engineers
Contributor
Subject
Genre
Language
eng
Member of
Action
digitized
Cataloging source
OCLCE
Dewey number
621.381/74
Illustrations
illustrations
Index
index present
LC call number
TK7871.85
LC item number
.D494
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Ruddell, Richard L.
  • Society of Photo-optical Instrumentation Engineers
Series statement
Proceedings of the Society of Photo-optical Instrumentation Engineers
Series volume
v. 135
http://library.link/vocab/subjectName
  • Semiconductors
  • Microlithography
Label
Developments in semiconductor microlithography III : April 10-11, 1978, San Jose, California, Richard L. Ruddell [and others] editors ; presented by the Society of Photo-optical Instrumentation Engineers
Instantiates
Publication
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and indexes
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource (vi, 170 pages)
Form of item
online
Isbn
9780892521623
Level of compression
  • lossless
  • lossy
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations.
Reformatting quality
  • preservation
  • access
Reproduction note
Electronic reproduction.
Specific material designation
remote
System details
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Label
Developments in semiconductor microlithography III : April 10-11, 1978, San Jose, California, Richard L. Ruddell [and others] editors ; presented by the Society of Photo-optical Instrumentation Engineers
Publication
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and indexes
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource (vi, 170 pages)
Form of item
online
Isbn
9780892521623
Level of compression
  • lossless
  • lossy
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations.
Reformatting quality
  • preservation
  • access
Reproduction note
Electronic reproduction.
Specific material designation
remote
System details
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.

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