The Resource Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia, Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section, (electronic book)

Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia, Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section, (electronic book)

Label
Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
Title
Device and process technologies for MEMS and microelectronics II
Title remainder
17-19 December, 2001, Adelaide, Australia
Statement of responsibility
Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Chiao, Jung-Chih
  • Society of Photo-optical Instrumentation Engineers
  • United States
  • Institute of Electrical and Electronics Engineers
  • SPIE Digital Library
Series statement
SPIE proceedings series
Series volume
4592
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Photon detectors
  • Photomechanical processes
  • Photolithography
Label
Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia, Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Dimensions
unknown
Extent
xi, 538 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Device and process technologies for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia, Jung-Chih Chiao, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section, (electronic book)
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Dimensions
unknown
Extent
xi, 538 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

Library Locations

Processing Feedback ...