The Resource Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia, Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia), (electronic book)

Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia, Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia), (electronic book)

Label
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia
Title
Device and process technologies for MEMS, microelectronics, and photonics III
Title remainder
10-12 December 2003, Perth, Australia
Statement of responsibility
Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)
Contributor
Editor
Editor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
http://bibfra.me/vocab/lite/collectionName
Device and process technologies for MEMS and microelectronics
Illustrations
illustrations
Index
index present
LC call number
TK7875
LC item number
.D49 2004
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Chiao, Jung-Chih
  • Society of Photo-optical Instrumentation Engineers
  • University of Western Australia
  • Defence Science and Technology Organisation (Australia)
Series statement
SPIE proceedings series,
Series volume
5276
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Photon detectors
  • Photomechanical processes
  • Photolithography
Label
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia, Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia), (electronic book)
Instantiates
Publication
Note
Earlier conferences have title: Device and process technologies for MEMS and microelectronics
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xxxiv, 566 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
Label
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia, Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia), (electronic book)
Publication
Note
Earlier conferences have title: Device and process technologies for MEMS and microelectronics
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xxxiv, 566 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote

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