Coverart for item
The Resource Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia, Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia), (electronic book)

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia, Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia), (electronic book)

Label
Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia
Title
Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV
Title remainder
5-7 December 2007, Canberra, Australia
Statement of responsibility
Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia)
Contributor
Subject
Genre
Language
eng
Related
Member of
Cataloging source
NHM
Illustrations
illustrations
Index
index present
LC call number
TK7875
LC item number
.D4823 2007e
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Tan, Hark Hoe
  • SPIE (Society)
  • Australian National University
  • University of Adelaide
Series statement
Proceedings of SPIE,
Series volume
6800
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Photonics
  • Photomechanical processes
  • Photolithography
  • Nanotechnology
Label
Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia, Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia), (electronic book)
Instantiates
Publication
Note
Earlier conferences entitled: Device and process technologies for MEMS and microelectronics, and, Device and process technologies for MEMS, microelectronics, and photonics
Antecedent source
unknown
Bibliography note
Includes bibliographical references and index
Color
multicolored
Dimensions
28 cm.
Dimensions
unknown
Extent
1 v. (various pagings)
File format
unknown
Form of item
electronic
Isbn
9780819469717
Level of compression
unknown
Other physical details
ill. (some col.)
Quality assurance targets
unknown
Reformatting quality
unknown
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
Label
Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia, Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia), (electronic book)
Publication
Note
Earlier conferences entitled: Device and process technologies for MEMS and microelectronics, and, Device and process technologies for MEMS, microelectronics, and photonics
Antecedent source
unknown
Bibliography note
Includes bibliographical references and index
Color
multicolored
Dimensions
28 cm.
Dimensions
unknown
Extent
1 v. (various pagings)
File format
unknown
Form of item
electronic
Isbn
9780819469717
Level of compression
unknown
Other physical details
ill. (some col.)
Quality assurance targets
unknown
Reformatting quality
unknown
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote

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