Coverart for item
The Resource EMLC 2007 : 23rd European Mask and Lithography Conference : 22-25 January 2007, Grenoble, France, Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, CEA-LETI (France) ... [et al.], (electronic book)

EMLC 2007 : 23rd European Mask and Lithography Conference : 22-25 January 2007, Grenoble, France, Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, CEA-LETI (France) ... [et al.], (electronic book)

Label
EMLC 2007 : 23rd European Mask and Lithography Conference : 22-25 January 2007, Grenoble, France
Title
EMLC 2007
Title remainder
23rd European Mask and Lithography Conference : 22-25 January 2007, Grenoble, France
Statement of responsibility
Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, CEA-LETI (France) ... [et al.]
Title variation
  • European Mask and Lithography Conference
  • European Conference on Mask Technology for Integrated Circuits and Microcomponents
  • 23rd European Mask and Lithography Conference
Creator
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Illustrations
illustrations
Index
index present
LC call number
TK7872.M3
LC item number
E97 2007e
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2007
http://bibfra.me/vocab/lite/meetingName
European Mask and Lithography Conference
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Behringer, Uwe F. W.
  • Maurer, Wilhelm
  • Waelpoel, Jacques
  • Society of Photo-optical Instrumentation Engineers
Series statement
Proceedings of SPIE,
Series volume
6533
http://library.link/vocab/subjectName
  • Integrated circuits
  • Microlithography
Label
EMLC 2007 : 23rd European Mask and Lithography Conference : 22-25 January 2007, Grenoble, France, Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, CEA-LETI (France) ... [et al.], (electronic book)
Instantiates
Publication
Antecedent source
unknown
Bibliography note
Includes bibliographical references and author index
Color
multicolored
Dimensions
28 cm.
Dimensions
unknown
Extent
1 v. (various pagings)
File format
unknown
Form of item
electronic
Isbn
9780819466556
Level of compression
unknown
Other physical details
ill. (some col.)
Quality assurance targets
unknown
Reformatting quality
unknown
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
Label
EMLC 2007 : 23rd European Mask and Lithography Conference : 22-25 January 2007, Grenoble, France, Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, CEA-LETI (France) ... [et al.], (electronic book)
Publication
Antecedent source
unknown
Bibliography note
Includes bibliographical references and author index
Color
multicolored
Dimensions
28 cm.
Dimensions
unknown
Extent
1 v. (various pagings)
File format
unknown
Form of item
electronic
Isbn
9780819466556
Level of compression
unknown
Other physical details
ill. (some col.)
Quality assurance targets
unknown
Reformatting quality
unknown
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote

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