Coverart for item
The Resource EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany, Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS ... [et al.], (electronic book)

EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany, Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS ... [et al.], (electronic book)

Label
EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany
Title
EMLC 2008
Title remainder
24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany
Statement of responsibility
Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS ... [et al.]
Title variation
  • European Mask and Lithography Conference 2008
  • 24th European Mask and Lithography Conference
Creator
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
STF
Illustrations
illustrations
Index
no index present
LC call number
TK7872.M3
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2008
http://bibfra.me/vocab/lite/meetingName
European Mask and Lithography Conference
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Behringer, Uwe F. W.
  • Maurer, Wilhelm.
  • Waelpoel, Jacques.
  • VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.
  • BACUS (Technical group)
  • SPIE (Society)
Series statement
Proceedings of SPIE,
Series volume
6792
http://library.link/vocab/subjectName
  • Integrated circuits
  • Microlithography
Label
EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany, Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS ... [et al.], (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and author index
Color
mixed
Dimensions
28 cm.
Dimensions
unknown
Extent
1 v. (various pagings)
Form of item
electronic
Isbn
9780819469564
Other physical details
ill. (some col.)
Reproduction note
Electronic resource.
Specific material designation
remote
Label
EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany, Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS ... [et al.], (electronic book)
Publication
Bibliography note
Includes bibliographical references and author index
Color
mixed
Dimensions
28 cm.
Dimensions
unknown
Extent
1 v. (various pagings)
Form of item
electronic
Isbn
9780819469564
Other physical details
ill. (some col.)
Reproduction note
Electronic resource.
Specific material designation
remote

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