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The Resource Electroceramic-based MEMS : fabrication-technology and applications, edited by Nava Setter, (electronic book)

Electroceramic-based MEMS : fabrication-technology and applications, edited by Nava Setter, (electronic book)

Label
Electroceramic-based MEMS : fabrication-technology and applications
Title
Electroceramic-based MEMS
Title remainder
fabrication-technology and applications
Statement of responsibility
edited by Nava Setter
Contributor
Subject
Language
eng
Summary
"The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including microsensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed." "This book is addressed to engineers, scientists and researchers of various disciplines - device engineers, materials engineers, chemists, physicists and microtechnologists - who are working and/or interested in this fast growing and highly promising field." "The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added."--Jacket
Member of
Cataloging source
DE-He213
Characteristic
online system or service
Image bit depth
0
http://library.link/vocab/relatedWorkOrContributorDate
1949-
http://library.link/vocab/relatedWorkOrContributorName
Setter, Nava
Series statement
Electronic materials: science and technology
Series volume
9
http://library.link/vocab/subjectName
Microelectromechanical systems
Label
Electroceramic-based MEMS : fabrication-technology and applications, edited by Nava Setter, (electronic book)
Instantiates
Publication
Antecedent source
mixed
Bibliography note
Includes bibliographical references and index
Color
not applicable
Contents
Cover -- Table of Contents -- Contributors -- Preface -- A. Applications and Devices -- Chapter 1. MEMS-Based Thin Film and Resonant Chemical Sensors -- 1. Introduction -- 2. MEMS-Based Sensor Platforms -- 3. Summary and Conclusions -- 4. Acknowledgements -- References -- Chapter 2. Microactuators Based on Thin Films -- 1. Introduction -- 2. Cantilever Type Actuators -- 3. Membrane Type Actuator -- 4. Conclusion -- References -- Chapter 3. Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films -- 1. Introduction -- 2. Clamped Plate Structure -- 3. Approximating Freely Suspended Plates -- 4. Emission Power -- 5. Quality FactorImmersed Operation -- 6. Discussion and Outlook -- 7. Acknowledgements -- References -- Chapter 4. Thick-Film Piezoelectric and Magnetostrictive Devices -- 1. Introduction -- 2. Thick-Film Piezoelectric Devices -- 3. Thick-Film Magnetostrictive Devices -- References -- Chapter 5. Micromachined Infrared Detectors Based on Pyroelectric Thin Films -- 1. Introduction -- 2. Fundamentals -- 3. Operation Principles of Pyroelectric Infrared Detectors -- 4. Thin Film Materials -- 5. Micromachining -- 6. Applications -- 7. Conclusions -- References -- Chapter 6. RF Bulk Acoustic Wave Resonators and Filters -- 1. Introduction -- 2. Experimental -- 3. Microstructure of AlN -- 4. Simulation -- 5. Resonator and Filter Performance -- 6. Conclusion -- 7. Acknowledgement -- References -- Chapter 7. High Frequency Tuneable Devices Based on Thin Ferroelectric Films -- 1. Introduction -- 2. Tuneable Microwave Technologies -- 3. Ferroelectric Varactors -- 4. Tuneable Ferroelectric Devices -- 5. Subsystem and System Applications of Tuneable Ferroelectric Devices -- 6. Conclusions -- References -- Chapter 8. MEMS for Optical Functionality -- 1. Introduction -- 2. Historical Background -- 3. Classification of Optical MEMS Devices -- 4. MEMS Products: Case Studies -- 5. Materials Challenges in Optical MEMS Devices -- 6. Conclusions and Discussion -- B. Materials, Fabrication-Technology, and Functionality -- Chapter 9. Ceramic Thick Films for MEMS -- 1. Introduction -- 2. Common Issues with Thick Film Production -- 3. Thick Film Deposition Techniques -- 4. Electrical Properties of PZT Thick Films -- 5. Patterning Thick Films -- 6. Conclusions -- 7. Acknowledgements -- References -- Chapter 10. Thin Film Piezoelectrics for MEMS -- 1. Introduction -- 2. Important Piezoelectric Coefficients for MEMS -- 3. AlN and ZnO -- 4. Ferroelectric Thin Films -- 5. Conclusions -- References -- Chapter 11. Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices -- 1. Introduction -- 2. Synthesis and Characterization of Ba1xSrxTi1+yO3+z Thin Films by RF-Magnetron Sputtering -- 3. Synthesis and Characterization of MOCVD Ba1xSrxTi1+yO3+z Thin Films -- 4. (BaxSr1x)Ti1+yO3+z Interface Contamination and Its Effect on Electrical Properties -- 5. Phase Shifters Based on Optimized Magnetron Sputter-De
Dimensions
unknown
File format
multiple file formats
Isbn
9780387233192
Level of compression
uncompressed
Quality assurance targets
absent
Reformatting quality
access
Specific material designation
remote
Label
Electroceramic-based MEMS : fabrication-technology and applications, edited by Nava Setter, (electronic book)
Publication
Antecedent source
mixed
Bibliography note
Includes bibliographical references and index
Color
not applicable
Contents
Cover -- Table of Contents -- Contributors -- Preface -- A. Applications and Devices -- Chapter 1. MEMS-Based Thin Film and Resonant Chemical Sensors -- 1. Introduction -- 2. MEMS-Based Sensor Platforms -- 3. Summary and Conclusions -- 4. Acknowledgements -- References -- Chapter 2. Microactuators Based on Thin Films -- 1. Introduction -- 2. Cantilever Type Actuators -- 3. Membrane Type Actuator -- 4. Conclusion -- References -- Chapter 3. Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films -- 1. Introduction -- 2. Clamped Plate Structure -- 3. Approximating Freely Suspended Plates -- 4. Emission Power -- 5. Quality FactorImmersed Operation -- 6. Discussion and Outlook -- 7. Acknowledgements -- References -- Chapter 4. Thick-Film Piezoelectric and Magnetostrictive Devices -- 1. Introduction -- 2. Thick-Film Piezoelectric Devices -- 3. Thick-Film Magnetostrictive Devices -- References -- Chapter 5. Micromachined Infrared Detectors Based on Pyroelectric Thin Films -- 1. Introduction -- 2. Fundamentals -- 3. Operation Principles of Pyroelectric Infrared Detectors -- 4. Thin Film Materials -- 5. Micromachining -- 6. Applications -- 7. Conclusions -- References -- Chapter 6. RF Bulk Acoustic Wave Resonators and Filters -- 1. Introduction -- 2. Experimental -- 3. Microstructure of AlN -- 4. Simulation -- 5. Resonator and Filter Performance -- 6. Conclusion -- 7. Acknowledgement -- References -- Chapter 7. High Frequency Tuneable Devices Based on Thin Ferroelectric Films -- 1. Introduction -- 2. Tuneable Microwave Technologies -- 3. Ferroelectric Varactors -- 4. Tuneable Ferroelectric Devices -- 5. Subsystem and System Applications of Tuneable Ferroelectric Devices -- 6. Conclusions -- References -- Chapter 8. MEMS for Optical Functionality -- 1. Introduction -- 2. Historical Background -- 3. Classification of Optical MEMS Devices -- 4. MEMS Products: Case Studies -- 5. Materials Challenges in Optical MEMS Devices -- 6. Conclusions and Discussion -- B. Materials, Fabrication-Technology, and Functionality -- Chapter 9. Ceramic Thick Films for MEMS -- 1. Introduction -- 2. Common Issues with Thick Film Production -- 3. Thick Film Deposition Techniques -- 4. Electrical Properties of PZT Thick Films -- 5. Patterning Thick Films -- 6. Conclusions -- 7. Acknowledgements -- References -- Chapter 10. Thin Film Piezoelectrics for MEMS -- 1. Introduction -- 2. Important Piezoelectric Coefficients for MEMS -- 3. AlN and ZnO -- 4. Ferroelectric Thin Films -- 5. Conclusions -- References -- Chapter 11. Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices -- 1. Introduction -- 2. Synthesis and Characterization of Ba1xSrxTi1+yO3+z Thin Films by RF-Magnetron Sputtering -- 3. Synthesis and Characterization of MOCVD Ba1xSrxTi1+yO3+z Thin Films -- 4. (BaxSr1x)Ti1+yO3+z Interface Contamination and Its Effect on Electrical Properties -- 5. Phase Shifters Based on Optimized Magnetron Sputter-De
Dimensions
unknown
File format
multiple file formats
Isbn
9780387233192
Level of compression
uncompressed
Quality assurance targets
absent
Reformatting quality
access
Specific material designation
remote

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