The Resource Electromigration in ULSI interconnections, Cher Ming Tan, (electronic book)

Electromigration in ULSI interconnections, Cher Ming Tan, (electronic book)

Label
Electromigration in ULSI interconnections
Title
Electromigration in ULSI interconnections
Statement of responsibility
Cher Ming Tan
Creator
Contributor
Subject
Language
eng
Summary
Electromigration in ULSI Interconnections provides a comprehensive description of the electromigration in integrated circuits. It is intended for both beginner and advanced readers on electromigration in ULSI interconnections. It begins with the basic knowledge required for a detailed study on electromigration, and examines the various interconnected systems and their evolution employed in integrated circuit technology. The subsequent chapters provide a detailed description of the physics of electromigration in both Al- and Cu-based interconnections, in the form of theoretical, experimental and numerical modeling studies. The differences in the electromigration of Al- and Cu-based interconnections and the corresponding underlying physical mechanisms for these differences are explained. The test structures, testing methodology, failure analysis methodology and statistical analysis of the test data for the experimental studies on electromigration are presented in a concise and rigorous manner. Methods of numerical modeling for the interconnect electromigration and their applications to the understanding of electromigration physics are described in detail with the aspects of material properties, interconnection design, and interconnect process parameters on the electromigration performances of interconnects in ULSI further elaborated upon. Finally, the extension of the studies to narrow interconnections is introduced, and future challenges on the study of electromigration are outlined and discussed
Member of
Cataloging source
CaPaEBR
http://library.link/vocab/creatorDate
1959-
http://library.link/vocab/creatorName
Tan, Cher Ming
Illustrations
  • illustrations
  • portraits
Index
index present
LC call number
TK7874.76
LC item number
.T36 2010eb
Literary form
non fiction
Nature of contents
  • standards specifications
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
World Scientific (Firm)
http://library.link/vocab/subjectName
  • Integrated circuits
  • Electrodiffusion
Label
Electromigration in ULSI interconnections, Cher Ming Tan, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
ebr10480052
Dimensions
unknown
Extent
xix, 291 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Original version note
Original electronic resource
Other physical details
ill. (some col.), col. port.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Electromigration in ULSI interconnections, Cher Ming Tan, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
ebr10480052
Dimensions
unknown
Extent
xix, 291 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Original version note
Original electronic resource
Other physical details
ill. (some col.), col. port.
Reproduction note
Electronic resource.
Specific material designation
remote

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