Coverart for item
The Resource Emerging lithographic technologies XII : 26-28 February 2008, San Jose, California, USA, Frank M. Schellenberg, editor ; sponsored by SPIE ; cooperating organization, SEMATECH (USA), (electronic book)

Emerging lithographic technologies XII : 26-28 February 2008, San Jose, California, USA, Frank M. Schellenberg, editor ; sponsored by SPIE ; cooperating organization, SEMATECH (USA), (electronic book)

Label
Emerging lithographic technologies XII : 26-28 February 2008, San Jose, California, USA
Title
Emerging lithographic technologies XII
Title remainder
26-28 February 2008, San Jose, California, USA
Statement of responsibility
Frank M. Schellenberg, editor ; sponsored by SPIE ; cooperating organization, SEMATECH (USA)
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
STF
Illustrations
illustrations
Index
no index present
LC call number
TK7874
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1959-
http://library.link/vocab/relatedWorkOrContributorName
  • Schellenberg, F. M.
  • SPIE (Society)
  • International SEMATECH.
Series statement
Proceedings of SPIE,
Series volume
6921
http://library.link/vocab/subjectName
  • Lithography, Electron beam
  • Microlithography
  • X-ray lithography
  • X-rays
  • Masks (Electronics)
Label
Emerging lithographic technologies XII : 26-28 February 2008, San Jose, California, USA, Frank M. Schellenberg, editor ; sponsored by SPIE ; cooperating organization, SEMATECH (USA), (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and author index
Color
mixed
Dimensions
28 cm.
Dimensions
unknown
Extent
2 v.
Form of item
electronic
Isbn
9780819471062
Other physical details
ill. (some col.)
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Emerging lithographic technologies XII : 26-28 February 2008, San Jose, California, USA, Frank M. Schellenberg, editor ; sponsored by SPIE ; cooperating organization, SEMATECH (USA), (electronic book)
Publication
Bibliography note
Includes bibliographical references and author index
Color
mixed
Dimensions
28 cm.
Dimensions
unknown
Extent
2 v.
Form of item
electronic
Isbn
9780819471062
Other physical details
ill. (some col.)
Reproduction note
Electronic resource.
Specific material designation
remote

Library Locations

Processing Feedback ...