Coverart for item
The Resource Fundamental principles of optical lithography : the science of microfabrication, Chris Mack, (electronic book)

Fundamental principles of optical lithography : the science of microfabrication, Chris Mack, (electronic book)

Label
Fundamental principles of optical lithography : the science of microfabrication
Title
Fundamental principles of optical lithography
Title remainder
the science of microfabrication
Statement of responsibility
Chris Mack
Creator
Subject
Language
eng
Member of
Cataloging source
CaPaEBR
http://library.link/vocab/creatorName
Mack, Chris A
Dewey number
621.3815/31
Illustrations
illustrations
Index
index present
LC call number
TK7874
LC item number
.M196 2007eb
Literary form
non fiction
Nature of contents
  • standards specifications
  • bibliography
http://library.link/vocab/subjectName
  • Integrated circuits
  • Microlithography
Label
Fundamental principles of optical lithography : the science of microfabrication, Chris Mack, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Control code
ebr10300846
Dimensions
25 cm.
Dimensions
unknown
Extent
xvii, 515 p.
Form of item
electronic
Isbn
9780470727300
Original version note
Original electronic resource
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Fundamental principles of optical lithography : the science of microfabrication, Chris Mack, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Control code
ebr10300846
Dimensions
25 cm.
Dimensions
unknown
Extent
xvii, 515 p.
Form of item
electronic
Isbn
9780470727300
Original version note
Original electronic resource
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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