Coverart for item
The Resource Handbook of microlithography, micromachining, and microfabrication, P. Rai-Choudhury, editor

Handbook of microlithography, micromachining, and microfabrication, P. Rai-Choudhury, editor

Label
Handbook of microlithography, micromachining, and microfabrication
Title
Handbook of microlithography, micromachining, and microfabrication
Statement of responsibility
P. Rai-Choudhury, editor
Contributor
Subject
Language
eng
Cataloging source
DLC
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
Rai-Choudhury, P
Series statement
Institution of Electrical Engineers.
Series volume
12, 12B
http://library.link/vocab/subjectName
  • Microlithography
  • Micromachining
  • Microfabrication
Label
Handbook of microlithography, micromachining, and microfabrication, P. Rai-Choudhury, editor
Instantiates
Bibliography note
Includes bibliographical references and index
Contents
  • Vol. 1.
  • Microlithography
  • Vol. 2.
  • Micromachining and microfabrication
Control code
990852969112
Dimensions
26 cm.
Extent
2 v. (viii, 768; viii, 692 p.)
Isbn
9780852969113
Lccn
lc96040237
Other physical details
ill.
Label
Handbook of microlithography, micromachining, and microfabrication, P. Rai-Choudhury, editor
Bibliography note
Includes bibliographical references and index
Contents
  • Vol. 1.
  • Microlithography
  • Vol. 2.
  • Micromachining and microfabrication
Control code
990852969112
Dimensions
26 cm.
Extent
2 v. (viii, 768; viii, 692 p.)
Isbn
9780852969113
Lccn
lc96040237
Other physical details
ill.

Library Locations

    • Harold Cohen LibraryBorrow it
      Ashton Street, Liverpool, L69 3DA, GB
      53.418074 -2.967913
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