Coverart for item
The Resource Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California, Kevin M. Monahan, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering

Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California, Kevin M. Monahan, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering

Label
Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California
Title
Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California
Statement of responsibility
Kevin M. Monahan, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering
Contributor
Subject
Genre
Language
eng
Member of
Action
digitized
Cataloging source
OCLCE
Dewey number
621.381/5
Illustrations
illustrations
Index
index present
LC call number
  • TK7874
  • TS510
LC item number
  • .I5427 1989
  • .P632 v. 1087
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Monahan, Kevin M
  • Society of Photo-optical Instrumentation Engineers
Series statement
Proceedings / SPIE--the International Society for Optical Engineering
Series volume
1087
http://library.link/vocab/subjectName
  • Integrated circuits
  • Integrated circuits
Label
Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California, Kevin M. Monahan, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering
Instantiates
Publication
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource (x, 535 pages)
Form of item
online
Isbn
9780819401229
Level of compression
  • lossless
  • lossy
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations.
Reformatting quality
  • preservation
  • access
Reproduction note
Electronic reproduction.
Specific material designation
remote
System details
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Label
Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California, Kevin M. Monahan, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering
Publication
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource (x, 535 pages)
Form of item
online
Isbn
9780819401229
Level of compression
  • lossless
  • lossy
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations.
Reformatting quality
  • preservation
  • access
Reproduction note
Electronic reproduction.
Specific material designation
remote
System details
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.

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