The Resource Integrated circuit metrology, inspection, and process control VII : 2-4 March 1993, San Jose, California, Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering, (electronic book)

Integrated circuit metrology, inspection, and process control VII : 2-4 March 1993, San Jose, California, Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering, (electronic book)

Label
Integrated circuit metrology, inspection, and process control VII : 2-4 March 1993, San Jose, California
Title
Integrated circuit metrology, inspection, and process control VII
Title remainder
2-4 March 1993, San Jose, California
Statement of responsibility
Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Dewey number
778.3
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Postek, Michael T
  • Society of Photo-optical Instrumentation Engineers
  • SPIE Digital Library
Series statement
Proceedings / SPIE--the International Society for Optical Engineering,
Series volume
1926
http://library.link/vocab/subjectName
  • Integrated circuits
  • Integrated circuits
  • Integrated circuits
  • Mensuration
Label
Integrated circuit metrology, inspection, and process control VII : 2-4 March 1993, San Jose, California, Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and author index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xi, 594 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Integrated circuit metrology, inspection, and process control VII : 2-4 March 1993, San Jose, California, Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering, (electronic book)
Publication
Bibliography note
Includes bibliographical references and author index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xi, 594 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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