Coverart for item
The Resource Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California, William H. Arnold, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering, (electronic book)

Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California, William H. Arnold, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering, (electronic book)

Label
Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California
Title
Integrated circuit metrology, inspection, and process control IV
Title remainder
5-6 March 1990, San Jose, California
Statement of responsibility
William H. Arnold, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Dewey number
621.381/5
Illustrations
illustrations
Index
index present
LC call number
TK7874
LC item number
.I5428 1990
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Arnold, William H
  • Society of Photo-optical Instrumentation Engineers
  • SPIE Digital Library
Series statement
SPIE proceedings series,
Series volume
1261
http://library.link/vocab/subjectName
  • Integrated circuits
  • Integrated circuits
Label
Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California, William H. Arnold, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
viii, 528 p.
Form of item
electronic
Isbn
9780819403087
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
Label
Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California, William H. Arnold, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
viii, 528 p.
Form of item
electronic
Isbn
9780819403087
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote

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