The Resource Integrated circuit metrology, inspection, and process control : [papers], Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, 4-6 March 1987, Santa Clara, California
Integrated circuit metrology, inspection, and process control : [papers], Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, 4-6 March 1987, Santa Clara, California
Resource Information
The item Integrated circuit metrology, inspection, and process control : [papers], Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, 4-6 March 1987, Santa Clara, California represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Liverpool.This item is available to borrow from 1 library branch.
Resource Information
The item Integrated circuit metrology, inspection, and process control : [papers], Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, 4-6 March 1987, Santa Clara, California represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Liverpool.
This item is available to borrow from 1 library branch.
- Language
- eng
- Extent
- 1 online resource (vi, 329 pages)
- Isbn
- 9780892528103
- Label
- Integrated circuit metrology, inspection, and process control : [papers]
- Title
- Integrated circuit metrology, inspection, and process control
- Title remainder
- [papers]
- Statement of responsibility
- Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, 4-6 March 1987, Santa Clara, California
- Language
- eng
- Action
- digitized
- Cataloging source
- OCLCE
- Dewey number
- 621.381/73
- Illustrations
- illustrations
- Index
- index present
- LC call number
- TK7874
- LC item number
- .I5468 1987
- Literary form
- non fiction
- Nature of contents
-
- dictionaries
- bibliography
- http://library.link/vocab/relatedWorkOrContributorName
-
- Monahan, Kevin M
- Society of Photo-optical Instrumentation Engineers
- Series statement
- Proceedings of SPIE--the International Society for Optical Engineering
- Series volume
- 775
- http://library.link/vocab/subjectName
- Integrated circuits
- Label
- Integrated circuit metrology, inspection, and process control : [papers], Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, 4-6 March 1987, Santa Clara, California
- Antecedent source
- file reproduced from original
- Bibliography note
- Includes bibliographical references and index
- Carrier category
- online resource
- Carrier category code
-
- cr
- Carrier MARC source
- rdacarrier
- Color
- black and white
- Content category
- text
- Content type code
-
- txt
- Content type MARC source
- rdacontent
- Dimensions
- unknown
- Extent
- 1 online resource (vi, 329 pages)
- Form of item
- online
- Isbn
- 9780892528103
- Level of compression
-
- lossless
- lossy
- Media category
- computer
- Media MARC source
- rdamedia
- Media type code
-
- c
- Other physical details
- illustrations.
- Reformatting quality
-
- preservation
- access
- Reproduction note
- Electronic reproduction.
- Specific material designation
- remote
- System details
- Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
- Label
- Integrated circuit metrology, inspection, and process control : [papers], Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, 4-6 March 1987, Santa Clara, California
- Antecedent source
- file reproduced from original
- Bibliography note
- Includes bibliographical references and index
- Carrier category
- online resource
- Carrier category code
-
- cr
- Carrier MARC source
- rdacarrier
- Color
- black and white
- Content category
- text
- Content type code
-
- txt
- Content type MARC source
- rdacontent
- Dimensions
- unknown
- Extent
- 1 online resource (vi, 329 pages)
- Form of item
- online
- Isbn
- 9780892528103
- Level of compression
-
- lossless
- lossy
- Media category
- computer
- Media MARC source
- rdamedia
- Media type code
-
- c
- Other physical details
- illustrations.
- Reformatting quality
-
- preservation
- access
- Reproduction note
- Electronic reproduction.
- Specific material designation
- remote
- System details
- Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/portal/Integrated-circuit-metrology-inspection-and/xKt7QtZi8yg/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/portal/Integrated-circuit-metrology-inspection-and/xKt7QtZi8yg/">Integrated circuit metrology, inspection, and process control : [papers], Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, 4-6 March 1987, Santa Clara, California</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">University of Liverpool</a></span></span></span></span></div>
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/portal/Integrated-circuit-metrology-inspection-and/xKt7QtZi8yg/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/portal/Integrated-circuit-metrology-inspection-and/xKt7QtZi8yg/">Integrated circuit metrology, inspection, and process control : [papers], Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, 4-6 March 1987, Santa Clara, California</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">University of Liverpool</a></span></span></span></span></div>
