Coverart for item
The Resource Introduction to microlithography : theory, materials, and processing, L.F. Thompson, C.G. Willson, M.J. Bowden, editors ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983, (electronic book)

Introduction to microlithography : theory, materials, and processing, L.F. Thompson, C.G. Willson, M.J. Bowden, editors ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983, (electronic book)

Label
Introduction to microlithography : theory, materials, and processing
Title
Introduction to microlithography
Title remainder
theory, materials, and processing
Statement of responsibility
L.F. Thompson, C.G. Willson, M.J. Bowden, editors ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
Contributor
Subject
Genre
Language
eng
Cataloging source
DLC
Illustrations
illustrations
Index
index present
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorDate
  • 1944-
  • 1939-
  • 1943-
  • 1983 :
http://library.link/vocab/relatedWorkOrContributorName
  • Thompson, L. F.
  • Willson, C. G.
  • Bowden, M. J.
  • American Chemical Society
  • American Chemical Society
Series statement
ACS symposium series
Series volume
219
http://library.link/vocab/subjectName
  • Microlithography
  • Photoresists
  • Plasma etching
  • Semiconductors
Label
Introduction to microlithography : theory, materials, and processing, L.F. Thompson, C.G. Willson, M.J. Bowden, editors ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
An introduction to lithography / L.F. Thompson -- The lithographic process--the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials--theory and chemistry / C. Grant Willson -- Resist processing / L.F. Thompson and M.J. Bowden -- Plasma etching / J.A. Mucha and D.W. Hess -- Multi-layer resist systems / B.J. Lin
Dimensions
24 cm.
Extent
ix, 363 p.
Form of item
electronic
Isbn
9780841207752
Lccn
83005968
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic Resource.
Label
Introduction to microlithography : theory, materials, and processing, L.F. Thompson, C.G. Willson, M.J. Bowden, editors ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
An introduction to lithography / L.F. Thompson -- The lithographic process--the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials--theory and chemistry / C. Grant Willson -- Resist processing / L.F. Thompson and M.J. Bowden -- Plasma etching / J.A. Mucha and D.W. Hess -- Multi-layer resist systems / B.J. Lin
Dimensions
24 cm.
Extent
ix, 363 p.
Form of item
electronic
Isbn
9780841207752
Lccn
83005968
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic Resource.

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