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The Resource Introduction to microlithography, edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden

Introduction to microlithography, edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden

Label
Introduction to microlithography
Title
Introduction to microlithography
Statement of responsibility
edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden
Contributor
Subject
Language
eng
Cataloging source
DLC
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorDate
  • 1944-
  • 1939-
  • 1943-
http://library.link/vocab/relatedWorkOrContributorName
  • Thompson, L. F.
  • Willson, C. G.
  • Bowden, M. J.
http://library.link/vocab/subjectName
  • Microlithography
  • Photoresists
  • Plasma etching
  • Semiconductors
Label
Introduction to microlithography, edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Contents
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil
Control code
9893042023
Dimensions
24 cm.
Edition
2nd ed.
Extent
xiv, 527 p.
Isbn
9780841228481
Lccn
93042023
Other physical details
ill.
Label
Introduction to microlithography, edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden
Publication
Bibliography note
Includes bibliographical references and index
Contents
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil
Control code
9893042023
Dimensions
24 cm.
Edition
2nd ed.
Extent
xiv, 527 p.
Isbn
9780841228481
Lccn
93042023
Other physical details
ill.

Library Locations

    • Harold Cohen LibraryBorrow it
      Ashton Street, Liverpool, L69 3DA, GB
      53.418074 -2.967913
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