Coverart for item
The Resource Journal of micro/nanolithography, MEMS, and MOEMS : JM3, (electronic journal)

Journal of micro/nanolithography, MEMS, and MOEMS : JM3, (electronic journal)

Label
Journal of micro/nanolithography, MEMS, and MOEMS : JM3
Title
Journal of micro/nanolithography, MEMS, and MOEMS
Title remainder
JM3
Title variation
JM3
Contributor
Subject
Genre
Language
eng
Member of
Continues
Cataloging source
NSDP
Characteristic
periodical
Entry convention
successive entry
Frequency
quarterly
LC call number
TK7874
LC item number
.J6668
Nature of contents
dictionaries
Original alphabet or script of title
basic roman
Regularity
regular
http://library.link/vocab/relatedWorkOrContributorName
Society of Photo-optical Instrumentation Engineers
http://library.link/vocab/subjectName
  • Microelectronics
  • Microlithography
  • Microfabrication
Label
Journal of micro/nanolithography, MEMS, and MOEMS : JM3, (electronic journal)
Instantiates
Publication
Note
Title from cover
Control code
ebs302133e
Dimensions
unknown
Issn
  • 1932-5134
  • 1932-5150 1537-1646
Publication frequency
Quarterly
Sound
unknown sound
Specific material designation
remote
System control number
  • (OCoLC)70598798
  • (EBZ)ebs302133e
Label
Journal of micro/nanolithography, MEMS, and MOEMS : JM3, (electronic journal)
Publication
Note
Title from cover
Control code
ebs302133e
Dimensions
unknown
Issn
  • 1932-5134
  • 1932-5150 1537-1646
Publication frequency
Quarterly
Sound
unknown sound
Specific material designation
remote
System control number
  • (OCoLC)70598798
  • (EBZ)ebs302133e

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