The Resource Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA, Henry Helvajian ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering, (electronic book)

Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA, Henry Helvajian ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering, (electronic book)

Label
Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA
Title
Laser applications in microelectronic and optoelectronic manufacturing V
Title remainder
24-26 January, 2000, San Jose, USA
Statement of responsibility
Henry Helvajian ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Illustrations
illustrations
Index
no index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Helvajian, Henry
  • United States
  • Society of Photo-optical Instrumentation Engineers
Series statement
Proceedings of SPIE
Series volume
3933
http://library.link/vocab/subjectName
  • Microelectronics industry
  • Lasers
  • Manufacturing processes
  • Laser ablation
  • Optoelectronic devices
Label
Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA, Henry Helvajian ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Dimensions
unknown
Extent
xi, 514 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA, Henry Helvajian ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering, (electronic book)
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Dimensions
unknown
Extent
xi, 514 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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