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The Resource Laser microfabrication : thin film processes and lithography, edited by Daniel J. Ehrlich, Jeffrey Y. Tsao

Laser microfabrication : thin film processes and lithography, edited by Daniel J. Ehrlich, Jeffrey Y. Tsao

Label
Laser microfabrication : thin film processes and lithography
Title
Laser microfabrication
Title remainder
thin film processes and lithography
Statement of responsibility
edited by Daniel J. Ehrlich, Jeffrey Y. Tsao
Contributor
Subject
Language
eng
Cataloging source
DLC
Illustrations
illustrations
Index
index present
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorName
  • Ehrlich, Daniel J
  • Tsao, Jeffrey Y
http://library.link/vocab/subjectName
  • Lasers
  • Thin film devices
  • Microlithography
  • Microfabrication
Label
Laser microfabrication : thin film processes and lithography, edited by Daniel J. Ehrlich, Jeffrey Y. Tsao
Instantiates
Publication
Bibliography note
Includes bibliographies and index
Control code
l80088024215
Dimensions
24 cm.
Extent
xii, 587 p
Isbn
9780122334306
Lccn
lc88024215
Other physical details
ill
Label
Laser microfabrication : thin film processes and lithography, edited by Daniel J. Ehrlich, Jeffrey Y. Tsao
Publication
Bibliography note
Includes bibliographies and index
Control code
l80088024215
Dimensions
24 cm.
Extent
xii, 587 p
Isbn
9780122334306
Lccn
lc88024215
Other physical details
ill

Library Locations

    • Harold Cohen LibraryBorrow it
      Ashton Street, Liverpool, L69 3DA, GB
      53.418074 -2.967913
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