Coverart for item
The Resource Lasers in microlithography : 2-3 March 1987, Santa Clara, California, Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

Lasers in microlithography : 2-3 March 1987, Santa Clara, California, Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

Label
Lasers in microlithography : 2-3 March 1987, Santa Clara, California
Title
Lasers in microlithography
Title remainder
2-3 March 1987, Santa Clara, California
Statement of responsibility
Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Language
eng
Member of
Action
digitized
Cataloging source
OCLCE
Dewey number
621.381/531
Illustrations
illustrations
Index
index present
LC call number
TA1673
LC item number
.L376 1987
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Ehrlich, Daniel J.
  • Tsao, Jeffrey Y.
  • Batchelder, John Samuel.
  • Society of Photo-optical Instrumentation Engineers
Series statement
Proceedings of SPIE--the International Society for Optical Engineering
Series volume
v. 774
http://library.link/vocab/subjectName
  • Lasers
  • Microlithography
Label
Lasers in microlithography : 2-3 March 1987, Santa Clara, California, Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Instantiates
Publication
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource (iv [i.e. vi], 192 pages)
Form of item
online
Isbn
9780892528097
Level of compression
  • lossless
  • lossy
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations.
Reformatting quality
  • preservation
  • access
Reproduction note
Electronic reproduction.
Specific material designation
remote
System details
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Label
Lasers in microlithography : 2-3 March 1987, Santa Clara, California, Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publication
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource (iv [i.e. vi], 192 pages)
Form of item
online
Isbn
9780892528097
Level of compression
  • lossless
  • lossy
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations.
Reformatting quality
  • preservation
  • access
Reproduction note
Electronic reproduction.
Specific material designation
remote
System details
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.

Library Locations

Processing Feedback ...