The Resource Lithographic and micromachining techniques for optical component fabrication : 29-30 July 2001, San Diego, USA, Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)

Lithographic and micromachining techniques for optical component fabrication : 29-30 July 2001, San Diego, USA, Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)

Label
Lithographic and micromachining techniques for optical component fabrication : 29-30 July 2001, San Diego, USA
Title
Lithographic and micromachining techniques for optical component fabrication
Title remainder
29-30 July 2001, San Diego, USA
Statement of responsibility
Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Kley, Ernst-Bernhard
  • Herzig, Hans Peter
  • Society of Photo-optical Instrumentation Engineers
  • SPIE Digital Library
Series statement
SPIE proceedings series
Series volume
4440
http://library.link/vocab/subjectName
  • Optical instruments
  • Lenses
  • Micromachining
  • Microlithography
Label
Lithographic and micromachining techniques for optical component fabrication : 29-30 July 2001, San Diego, USA, Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
x, 324 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Lithographic and micromachining techniques for optical component fabrication : 29-30 July 2001, San Diego, USA, Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
x, 324 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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