The Resource Lithographic and micromachining techniques for optical component fabrication II : 3-4 August, 2003, San Diego, California, USA, Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, (electronic book)

Lithographic and micromachining techniques for optical component fabrication II : 3-4 August, 2003, San Diego, California, USA, Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, (electronic book)

Label
Lithographic and micromachining techniques for optical component fabrication II : 3-4 August, 2003, San Diego, California, USA
Title
Lithographic and micromachining techniques for optical component fabrication II
Title remainder
3-4 August, 2003, San Diego, California, USA
Statement of responsibility
Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Kley, Ernst-Bernhard
  • Herzig, Hans Peter
  • Society of Photo-optical Instrumentation Engineers
  • SPIE Digital Library
Series statement
SPIE proceedings series
Series volume
5183
http://library.link/vocab/subjectName
  • Optical instruments
  • Lenses
  • Micromachining
  • Microlithography
Label
Lithographic and micromachining techniques for optical component fabrication II : 3-4 August, 2003, San Diego, California, USA, Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Dimensions
unknown
Extent
vii, 208 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
Label
Lithographic and micromachining techniques for optical component fabrication II : 3-4 August, 2003, San Diego, California, USA, Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, (electronic book)
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Dimensions
unknown
Extent
vii, 208 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote

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