The Resource Lithography : principles, processes and materials, Theodore C. Hennessy, editor, (electronic book)

Lithography : principles, processes and materials, Theodore C. Hennessy, editor, (electronic book)

Label
Lithography : principles, processes and materials
Title
Lithography
Title remainder
principles, processes and materials
Statement of responsibility
Theodore C. Hennessy, editor
Contributor
Subject
Language
eng
Member of
Cataloging source
CaPaEBR
Dewey number
621.3815/31
Illustrations
illustrations
Index
index present
LC call number
TK7872.M3
LC item number
L58 2011eb
Literary form
non fiction
Nature of contents
  • standards specifications
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
Hennessy, Theodore C
http://library.link/vocab/subjectName
  • Microlithography
  • Microfabrication
Label
Lithography : principles, processes and materials, Theodore C. Hennessy, editor, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Control code
ebr10659070
Dimensions
unknown
Extent
xii, 284 p.
Form of item
electronic
Original version note
Original electronic resource
Other physical details
ill. (some col.).
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Lithography : principles, processes and materials, Theodore C. Hennessy, editor, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Control code
ebr10659070
Dimensions
unknown
Extent
xii, 284 p.
Form of item
electronic
Original version note
Original electronic resource
Other physical details
ill. (some col.).
Reproduction note
Electronic resource.
Specific material designation
remote

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