Coverart for item
The Resource Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)

Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)

Label
Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan
Title
Lithography Asia 2008
Title remainder
4-6 November 2008, Taipei, Taiwan
Statement of responsibility
Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Illustrations
  • illustrations
  • maps
Index
no index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1942-
http://library.link/vocab/relatedWorkOrContributorName
  • Chen, Alek C
  • Lin, Burn Jeng
  • Yen, Anthony.
  • SPIE (Society)
  • Taiwan Semiconductor Industry Association.
Series statement
Proceedings of SPIE,
Series volume
7140
http://library.link/vocab/subjectName
  • Lithography, Electron beam
  • Microlithography
  • X-ray lithography
  • X-rays
  • Masks (Electronics)
Label
Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)
Instantiates
Publication
Note
  • Title from PDF title page (viewed March 16, 2009)
  • Issued as part of the SPIE digital library
Antecedent source
unknown
Bibliography note
Includes bibliographical references
Color
multicolored
Dimensions
unknown
Extent
1 electronic text (PDF)
File format
unknown
Form of item
electronic
Isbn
9780819473813
Level of compression
unknown
Other physical details
ill. (some col.), maps
Quality assurance targets
unknown
Reformatting quality
unknown
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
System details
Mode of access: World Wide Web
Label
Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)
Publication
Note
  • Title from PDF title page (viewed March 16, 2009)
  • Issued as part of the SPIE digital library
Antecedent source
unknown
Bibliography note
Includes bibliographical references
Color
multicolored
Dimensions
unknown
Extent
1 electronic text (PDF)
File format
unknown
Form of item
electronic
Isbn
9780819473813
Level of compression
unknown
Other physical details
ill. (some col.), maps
Quality assurance targets
unknown
Reformatting quality
unknown
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
System details
Mode of access: World Wide Web

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