Coverart for item
The Resource Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)

Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)

Label
Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan
Title
Lithography Asia 2008
Title remainder
4-6 November 2008, Taipei, Taiwan
Statement of responsibility
Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Illustrations
  • illustrations
  • maps
Index
no index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1942-
http://library.link/vocab/relatedWorkOrContributorName
  • Chen, Alek C
  • Lin, Burn Jeng
  • Yen, Anthony
  • SPIE (Society)
  • Taiwan Semiconductor Industry Association
Series statement
Proceedings of SPIE,
Series volume
7140
http://library.link/vocab/subjectName
  • Lithography, Electron beam
  • Microlithography
  • X-ray lithography
  • X-rays
  • Masks (Electronics)
Label
Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)
Instantiates
Publication
Note
  • Title from PDF title page (viewed March 16, 2009)
  • Issued as part of the SPIE digital library
Antecedent source
unknown
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 electronic text (PDF)
File format
unknown
Form of item
electronic
Isbn
9780819473813
Level of compression
unknown
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill. (some col.), maps
Quality assurance targets
unknown
Reformatting quality
unknown
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
System details
Mode of access: World Wide Web
Label
Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)
Publication
Note
  • Title from PDF title page (viewed March 16, 2009)
  • Issued as part of the SPIE digital library
Antecedent source
unknown
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 electronic text (PDF)
File format
unknown
Form of item
electronic
Isbn
9780819473813
Level of compression
unknown
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill. (some col.), maps
Quality assurance targets
unknown
Reformatting quality
unknown
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
System details
Mode of access: World Wide Web

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