The Resource Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)
Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)
Resource Information
The item Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book) represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Liverpool.This item is available to borrow from 1 library branch.
Resource Information
The item Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book) represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Liverpool.
This item is available to borrow from 1 library branch.
- Language
- eng
- Extent
- 1 electronic text (PDF)
- Note
-
- Title from PDF title page (viewed March 16, 2009)
- Issued as part of the SPIE digital library
- Isbn
- 9780819473813
- Label
- Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan
- Title
- Lithography Asia 2008
- Title remainder
- 4-6 November 2008, Taipei, Taiwan
- Statement of responsibility
- Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association
- Language
- eng
- Cataloging source
- NHM
- Illustrations
-
- illustrations
- maps
- Index
- no index present
- Literary form
- non fiction
- Nature of contents
-
- dictionaries
- bibliography
- http://library.link/vocab/relatedWorkOrContributorDate
- 1942-
- http://library.link/vocab/relatedWorkOrContributorName
-
- Chen, Alek C
- Lin, Burn Jeng
- Yen, Anthony
- SPIE (Society)
- Taiwan Semiconductor Industry Association
- Series statement
- Proceedings of SPIE,
- Series volume
- 7140
- http://library.link/vocab/subjectName
-
- Lithography, Electron beam
- Microlithography
- X-ray lithography
- X-rays
- Masks (Electronics)
- Label
- Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)
- Note
-
- Title from PDF title page (viewed March 16, 2009)
- Issued as part of the SPIE digital library
- Antecedent source
- unknown
- Bibliography note
- Includes bibliographical references
- Carrier category
- online resource
- Carrier category code
-
- cr
- Carrier MARC source
- rdacarrier
- Color
- multicolored
- Content category
- text
- Content type code
-
- txt
- Content type MARC source
- rdacontent
- Dimensions
- unknown
- Extent
- 1 electronic text (PDF)
- File format
- unknown
- Form of item
- electronic
- Isbn
- 9780819473813
- Level of compression
- unknown
- Media category
- computer
- Media MARC source
- rdamedia
- Media type code
-
- c
- Other physical details
- ill. (some col.), maps
- Quality assurance targets
- unknown
- Reformatting quality
- unknown
- Reproduction note
- Electronic resource.
- Sound
- unknown sound
- Specific material designation
- remote
- System details
- Mode of access: World Wide Web
- Label
- Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)
- Note
-
- Title from PDF title page (viewed March 16, 2009)
- Issued as part of the SPIE digital library
- Antecedent source
- unknown
- Bibliography note
- Includes bibliographical references
- Carrier category
- online resource
- Carrier category code
-
- cr
- Carrier MARC source
- rdacarrier
- Color
- multicolored
- Content category
- text
- Content type code
-
- txt
- Content type MARC source
- rdacontent
- Dimensions
- unknown
- Extent
- 1 electronic text (PDF)
- File format
- unknown
- Form of item
- electronic
- Isbn
- 9780819473813
- Level of compression
- unknown
- Media category
- computer
- Media MARC source
- rdamedia
- Media type code
-
- c
- Other physical details
- ill. (some col.), maps
- Quality assurance targets
- unknown
- Reformatting quality
- unknown
- Reproduction note
- Electronic resource.
- Sound
- unknown sound
- Specific material designation
- remote
- System details
- Mode of access: World Wide Web
Subject
- Lithography, Electron beam -- Congresses
- Masks (Electronics) -- Congresses
- Microlithography -- Industrial applications -- Congresses
- X-ray lithography -- Congresses
- X-rays -- Industrial applications -- Congresses
Genre
Member of
- Proceedings of SPIE--the International Society for Optical Engineering, 7140
- Online access with subscription: SPIE digital library
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/portal/Lithography-Asia-2008--4-6-November-2008/hC4AsQ-2SWs/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/portal/Lithography-Asia-2008--4-6-November-2008/hC4AsQ-2SWs/">Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">University of Liverpool</a></span></span></span></span></div>
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Data Citation of the Item Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/portal/Lithography-Asia-2008--4-6-November-2008/hC4AsQ-2SWs/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/portal/Lithography-Asia-2008--4-6-November-2008/hC4AsQ-2SWs/">Lithography Asia 2008 : 4-6 November 2008, Taipei, Taiwan, Alek C. Chen, Burn Lin, Anthony Yen, editors ; sponsored and published by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association, (electronic book)</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">University of Liverpool</a></span></span></span></span></div>
