Coverart for item
The Resource Lithography Asia 2009 : 18-19 November 2009, Taipei, Taiwan, Alek C. Chen [and others], editors ; sponsored ... by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association (Taiwan)

Lithography Asia 2009 : 18-19 November 2009, Taipei, Taiwan, Alek C. Chen [and others], editors ; sponsored ... by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association (Taiwan)

Label
Lithography Asia 2009 : 18-19 November 2009, Taipei, Taiwan
Title
Lithography Asia 2009
Title remainder
18-19 November 2009, Taipei, Taiwan
Statement of responsibility
Alek C. Chen [and others], editors ; sponsored ... by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association (Taiwan)
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Illustrations
illustrations
Index
no index present
LC call number
TK7874
LC item number
.L58 2009
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Chen, Alek C.
  • SPIE (Society)
Series statement
Proceedings of SPIE,
Series volume
v. 7520
http://library.link/vocab/subjectName
  • Lithography, Electron beam
  • Microlithography
  • X-ray lithography
  • X-rays
  • Masks (Electronics)
Label
Lithography Asia 2009 : 18-19 November 2009, Taipei, Taiwan, Alek C. Chen [and others], editors ; sponsored ... by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association (Taiwan)
Instantiates
Publication
Note
Title from PDF title screen (SPIE digital library, viewed February 17, 2010)
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819479099
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Specific material designation
remote
Label
Lithography Asia 2009 : 18-19 November 2009, Taipei, Taiwan, Alek C. Chen [and others], editors ; sponsored ... by SPIE ; cooperating organization, TSIA--Taiwan Semiconducrtor Industry Association (Taiwan)
Publication
Note
Title from PDF title screen (SPIE digital library, viewed February 17, 2010)
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819479099
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Specific material designation
remote

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