Coverart for item
The Resource Low pressure plasmas and microstructuring technology, by Gerhard Franz, (electronic book)

Low pressure plasmas and microstructuring technology, by Gerhard Franz, (electronic book)

Label
Low pressure plasmas and microstructuring technology
Title
Low pressure plasmas and microstructuring technology
Statement of responsibility
by Gerhard Franz
Creator
Subject
Language
eng
Cataloging source
GW5XE
http://library.link/vocab/creatorName
Franz, Gerhard
Dewey number
621.044
Illustrations
illustrations
Index
no index present
LC call number
QC718
LC item number
.F73 2009
Literary form
non fiction
NAL call number
TA2020
NAL item number
.F73 2009
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/subjectName
  • Plasma (Ionized gases)
  • Plasma engineering
  • Plasma etching
  • Optical and Electronic Materials
  • Atomic and Molecular Structure and Spectra
  • Surfaces and Interfaces, Thin Films
  • Electronics and Microelectronics, Instrumentation
  • Material Science
Label
Low pressure plasmas and microstructuring technology, by Gerhard Franz, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references
Color
multicolored
Control code
SPR405546153
Dimensions
unknown
Extent
1 online resource.
Form of item
online
Isbn
9783540858492
Publisher number
11780793
Specific material designation
remote
Label
Low pressure plasmas and microstructuring technology, by Gerhard Franz, (electronic book)
Publication
Bibliography note
Includes bibliographical references
Color
multicolored
Control code
SPR405546153
Dimensions
unknown
Extent
1 online resource.
Form of item
online
Isbn
9783540858492
Publisher number
11780793
Specific material designation
remote

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