The Resource MEMS, MOEMS, and micromachining : 29-30 April 2004, Strasbourg, France, Hakan U+{u0088}rey, Ayman El-Fatatry, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)

MEMS, MOEMS, and micromachining : 29-30 April 2004, Strasbourg, France, Hakan U+{u0088}rey, Ayman El-Fatatry, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)

Label
MEMS, MOEMS, and micromachining : 29-30 April 2004, Strasbourg, France
Title
MEMS, MOEMS, and micromachining
Title remainder
29-30 April 2004, Strasbourg, France
Statement of responsibility
Hakan U+{u0088}rey, Ayman El-Fatatry, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1970-
http://library.link/vocab/relatedWorkOrContributorName
  • Urey, Hakan
  • El-Fatatry, Ayman
  • Society of Photo-optical Instrumentation Engineers
  • SPIE Digital Library
Series statement
Proceedings of SPIE,
Series volume
5455
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Optoelectronic devices
  • Micromachining
Label
MEMS, MOEMS, and micromachining : 29-30 April 2004, Strasbourg, France, Hakan U+{u0088}rey, Ayman El-Fatatry, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Dimensions
28 cm.
Dimensions
unknown
Extent
xi, 438 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
MEMS, MOEMS, and micromachining : 29-30 April 2004, Strasbourg, France, Hakan U+{u0088}rey, Ayman El-Fatatry, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Color
multicolored
Dimensions
28 cm.
Dimensions
unknown
Extent
xi, 438 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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