The Resource MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA, Albert K. Henning, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories, (electronic book)

MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA, Albert K. Henning, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories, (electronic book)

Label
MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA
Title
MEMS/MOEMS components and their applications II
Title remainder
24-25 January 2005, San Jose, California, USA
Statement of responsibility
Albert K. Henning, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Illustrations
illustrations
Index
index present
LC call number
TK7875
LC item number
.M1427 2005
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Henning, Albert Karl
  • Society of Photo-optical Instrumentation Engineers
  • Semiconductor Equipment and Materials International
  • Solid State Technology (Organization)
  • Sandia National Laboratories
Series statement
Proceedings of SPIE,
Series volume
5717
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Optoelectronic devices
Label
MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA, Albert K. Henning, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and author index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xli, 242 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA, Albert K. Henning, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories, (electronic book)
Publication
Bibliography note
Includes bibliographical references and author index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xli, 242 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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