The Resource MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book)

MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book)

Label
MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA
Title
MOEMS and miniaturized systems III
Title remainder
27-29 January 2003, San Jose, California, USA
Statement of responsibility
James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)
Title variation
Microelectromechanical systems and miniaturized systems III
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Illustrations
illustrations
Index
index present
LC call number
TK7874
LC item number
.M5326 2003
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Smith, James H
  • Krulevitch, Peter A
  • Lakner, Hubert K
  • Society of Photo-optical Instrumentation Engineers
  • Semiconductor Equipment and Materials International
  • Solid State Technology (Organization)
  • Sandia National Laboratories
Series statement
SPIE proceedings series,
Series volume
4983
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Miniature electronic equipment
  • Micromechanics
  • Optics, Adaptive
  • Optical scanners
Label
MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xlvi, 368 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill. (some col.)
Reproduction note
Electronic resource.
Specific material designation
remote
Label
MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xlvi, 368 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill. (some col.)
Reproduction note
Electronic resource.
Specific material designation
remote

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