The Resource MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book)
MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book)
Resource Information
The item MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book) represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in Sydney Jones Library, University of Liverpool.This item is available to borrow from 1 library branch.
Resource Information
The item MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book) represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in Sydney Jones Library, University of Liverpool.
This item is available to borrow from 1 library branch.
- Contributor
-
- Semiconductor Equipment and Materials International
- Semiconductor Equipment and Materials International
- Society of Photo-optical Instrumentation Engineers
- Solid State Technology (Organization)
- Solid State Technology (Organization)
- Krulevitch, Peter A
- Lakner, Hubert K
- Smith, James H
- Sandia National Laboratories
- Sandia National Laboratories
- Language
- eng
- Extent
- xlvi, 368 p.
- Label
- MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA
- Title
- MOEMS and miniaturized systems III
- Title remainder
- 27-29 January 2003, San Jose, California, USA
- Statement of responsibility
- James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)
- Title variation
- Microelectromechanical systems and miniaturized systems III
- Contributor
-
- Semiconductor Equipment and Materials International
- Semiconductor Equipment and Materials International
- Society of Photo-optical Instrumentation Engineers
- Solid State Technology (Organization)
- Solid State Technology (Organization)
- Krulevitch, Peter A
- Lakner, Hubert K
- Smith, James H
- Sandia National Laboratories
- Sandia National Laboratories
- Language
- eng
- Cataloging source
- SPIED
- Illustrations
- illustrations
- Index
- index present
- LC call number
- TK7874
- LC item number
- .M5326 2003
- Literary form
- non fiction
- Nature of contents
-
- dictionaries
- bibliography
- http://library.link/vocab/relatedWorkOrContributorName
-
- Smith, James H
- Krulevitch, Peter A
- Lakner, Hubert K
- Society of Photo-optical Instrumentation Engineers
- Semiconductor Equipment and Materials International
- Solid State Technology (Organization)
- Sandia National Laboratories
- Series statement
- SPIE proceedings series,
- Series volume
- 4983
- http://library.link/vocab/subjectName
-
- Microelectromechanical systems
- Miniature electronic equipment
- Micromechanics
- Optics, Adaptive
- Optical scanners
- Label
- MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book)
- Bibliography note
- Includes bibliographical references and index
- Carrier category
- online resource
- Carrier category code
-
- cr
- Carrier MARC source
- rdacarrier
- Content category
- text
- Content type code
-
- txt
- Content type MARC source
- rdacontent
- Dimensions
- 28 cm.
- Dimensions
- unknown
- Extent
- xlvi, 368 p.
- Form of item
- electronic
- Media category
- computer
- Media MARC source
- rdamedia
- Media type code
-
- c
- Other physical details
- ill. (some col.)
- Reproduction note
- Electronic resource.
- Specific material designation
- remote
- Label
- MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book)
- Bibliography note
- Includes bibliographical references and index
- Carrier category
- online resource
- Carrier category code
-
- cr
- Carrier MARC source
- rdacarrier
- Content category
- text
- Content type code
-
- txt
- Content type MARC source
- rdacontent
- Dimensions
- 28 cm.
- Dimensions
- unknown
- Extent
- xlvi, 368 p.
- Form of item
- electronic
- Media category
- computer
- Media MARC source
- rdamedia
- Media type code
-
- c
- Other physical details
- ill. (some col.)
- Reproduction note
- Electronic resource.
- Specific material designation
- remote
Subject
- Microelectromechanical systems -- Congresses
- Micromechanics -- Congresses
- Miniature electronic equipment -- Congresses
- Optical scanners -- Congresses
- Optics, Adaptive -- Congresses
Genre
Member of
- Proceedings of SPIE--the International Society for Optical Engineering, 4983
- Online access with subscription: SPIE digital library
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Data Citation of the Item MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book)
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/portal/MOEMS-and-miniaturized-systems-III--27-29/iWkOe40B-Tk/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/portal/MOEMS-and-miniaturized-systems-III--27-29/iWkOe40B-Tk/">MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA, James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA), (electronic book)</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">Sydney Jones Library, University of Liverpool</a></span></span></span></span></div>
