Coverart for item
The Resource Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)

Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)

Label
Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States
Title
Metrology Inspection and Process Control for Microlithography XXVIII
Title remainder
24-27 February 2014, San Jose, California, United States
Statement of responsibility
Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
Creator
Contributor
Editor
Issuing body
Sponsoring body
Subject
Genre
Language
eng
Member of
Cataloging source
COO
Dewey number
621.3815/31
Illustrations
illustrations
Index
no index present
LC call number
TK7874
LC item number
.I5554 2014e
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2014
http://bibfra.me/vocab/lite/meetingName
Metrology Inspection and Process Control for Microlithography
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Cain, Jason P.
  • Sanchez, Martha I.
  • SPIE (Society)
Series statement
Proceedings of SPIE,
Series volume
volume 9050
http://library.link/vocab/subjectName
  • Integrated circuits
  • Integrated circuits
  • Microlithography
  • Process control
Label
Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
Instantiates
Publication
Copyright
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
mixed
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819499738
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations (some color).
Specific material designation
remote
Label
Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
Publication
Copyright
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
mixed
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819499738
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations (some color).
Specific material designation
remote

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