The Resource Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
Resource Information
The item Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States) represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Liverpool.This item is available to borrow from 1 library branch.
Resource Information
The item Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States) represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Liverpool.
This item is available to borrow from 1 library branch.
- Language
- eng
- Label
- Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States
- Title
- Metrology Inspection and Process Control for Microlithography XXVIII
- Title remainder
- 24-27 February 2014, San Jose, California, United States
- Statement of responsibility
- Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
- Language
- eng
- Cataloging source
- COO
- Dewey number
- 621.3815/31
- Illustrations
- illustrations
- Index
- no index present
- LC call number
- TK7874
- LC item number
- .I5554 2014e
- Literary form
- non fiction
- http://bibfra.me/vocab/lite/meetingDate
- 2014
- http://bibfra.me/vocab/lite/meetingName
- Metrology Inspection and Process Control for Microlithography
- Nature of contents
-
- dictionaries
- bibliography
- http://library.link/vocab/relatedWorkOrContributorName
-
- Cain, Jason P.
- Sanchez, Martha I.
- SPIE (Society)
- Series statement
- Proceedings of SPIE,
- Series volume
- 9050
- http://library.link/vocab/subjectName
-
- Integrated circuits
- Integrated circuits
- Microlithography
- Process control
- Label
- Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
- Bibliography note
- Includes bibliographical references
- Carrier category
- online resource
- Carrier category code
-
- cr
- Carrier MARC source
- rdacarrier
- Color
- mixed
- Content category
- text
- Content type code
-
- txt
- Content type MARC source
- rdacontent
- Dimensions
- unknown
- Extent
- 1 online resource
- Form of item
- online
- Isbn
- 9780819499738
- Media category
- computer
- Media MARC source
- rdamedia
- Media type code
-
- c
- Other physical details
- illustrations (some color).
- Specific material designation
- remote
- Label
- Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
- Bibliography note
- Includes bibliographical references
- Carrier category
- online resource
- Carrier category code
-
- cr
- Carrier MARC source
- rdacarrier
- Color
- mixed
- Content category
- text
- Content type code
-
- txt
- Content type MARC source
- rdacontent
- Dimensions
- unknown
- Extent
- 1 online resource
- Form of item
- online
- Isbn
- 9780819499738
- Media category
- computer
- Media MARC source
- rdamedia
- Media type code
-
- c
- Other physical details
- illustrations (some color).
- Specific material designation
- remote
Subject
- Process control -- Congresses
- Microlithography -- Congresses
- Integrated circuits -- Measurement -- Congresses
- Integrated circuits -- Inspection -- Congresses
Genre
Member of
- Proceedings of SPIE--the International Society for Optical Engineering, v. 9050.
- Online access with subscription: SPIE digital library
- Proceedings of SPIE--the International Society for Optical Engineering, 9050.
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/portal/Metrology-Inspection-and-Process-Control-for/76phc5TWNr0/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/portal/Metrology-Inspection-and-Process-Control-for/76phc5TWNr0/">Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">University of Liverpool</a></span></span></span></span></div>
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Data Citation of the Item Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/portal/Metrology-Inspection-and-Process-Control-for/76phc5TWNr0/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/portal/Metrology-Inspection-and-Process-Control-for/76phc5TWNr0/">Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">University of Liverpool</a></span></span></span></span></div>
