Coverart for item
The Resource Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)

Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)

Label
Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States
Title
Metrology Inspection and Process Control for Microlithography XXVIII
Title remainder
24-27 February 2014, San Jose, California, United States
Statement of responsibility
Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
Creator
Contributor
Editor
Issuing body
Sponsoring body
Subject
Genre
Language
eng
Member of
Cataloging source
COO
Dewey number
621.3815/31
Illustrations
illustrations
Index
no index present
LC call number
TK7874
LC item number
.I5554 2014e
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2014
http://bibfra.me/vocab/lite/meetingName
Metrology Inspection and Process Control for Microlithography
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Cain, Jason P.
  • Sanchez, Martha I.
  • SPIE (Society)
Series statement
Proceedings of SPIE,
Series volume
9050
http://library.link/vocab/subjectName
  • Integrated circuits
  • Integrated circuits
  • Microlithography
  • Process control
Label
Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
Instantiates
Publication
Copyright
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
mixed
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819499738
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Specific material designation
remote
Label
Metrology Inspection and Process Control for Microlithography XXVIII : 24-27 February 2014, San Jose, California, United States, Jason P. Cain, Martha I. Sanchez, editors ; sponsored by SPIE ; cosponsored by NOVA Ltd. (United States)
Publication
Copyright
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
mixed
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819499738
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Specific material designation
remote

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